| 引用本文: | 潘春荣.具有清洗工艺的单臂组合设备终止暂态调度[J].控制理论与应用,2021,38(6):784~794.[点击复制] |
| PAN Chun-rong.Scheduling of close-down process for single-arm cluster tools with chamber cleaning operations[J].Control Theory and Technology,2021,38(6):784~794.[点击复制] |
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| 具有清洗工艺的单臂组合设备终止暂态调度 |
| Scheduling of close-down process for single-arm cluster tools with chamber cleaning operations |
| 摘要点击 1662 全文点击 577 投稿时间：2020-09-07 修订日期：2020-12-31 |
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| DOI编号 10.7641/CTA.2021.00603 |
| 2021,38(6):784-794 |
| 中文关键词 晶圆制造 组合设备 Petri网 清洗工艺 终止暂态 |
| 英文关键词 wafer fabrication cluster tool Petri net cleaning operation close-down process |
| 基金项目 国家自然科学基金项目(51665018)资助. |
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| 中文摘要 |
| 随着多品种小批量生产模式的普及, 导致了组合设备频繁的暂态加工过程. 为了提高组合设备的生产柔
性, 同时考虑晶圆驻留时间约束和腔室清洗时间约束, 研究了单臂组合设备的终止暂态调度问题. 首先, 提出了1–周
期清洗工艺的暂态调度规则, 并采用了面向资源的Petri网对单臂组合设备的终止暂态过程进行建模, 引入避免死锁
的变迁触发规则; 其次, 根据系统的终止暂态时间特性并考虑不同的调度情形, 建立了终止暂态调度的线性规划模
型; 最后, 通过实例验证了该方法的可行性. 实验结果表明, 与运用改进拉式策略的虚拟晶圆方案相比, 该调度方案
可有效地减少组合设备终止暂态的完工时间, 并满足晶圆制造的工艺要求. |
| 英文摘要 |
| With the model of multi-variety and small-batch production applied widely, it led to frequent transient process
of cluster tools. In order to improve the production flexibility of single-arm cluster tools, the scheduling of close-down
process problem is addressed considering the time constraints of wafer residency and chamber cleaning. Firstly, a transient
scheduling rule with 1-period of cleaning operations is proposed. Resource-oriented Petri net is used to model the closedown
process of single-arm cluster tools and a rule of transition firing is introduced to avoid deadlock. Secondly, according
to the close-down process time characteristics of the system and different scheduling situations, a corresponding linear
programming model is established to achieve close-down process optimal scheduling. Finally, examples are given to verify
the feasibility of the proposed approach. The experimental results show that the scheduling scheme can effectively reduce
close-down process makespan of single-arm cluster tools and meet wafer fabrication process requirements, compared with
the virtual wafer method based on extended backward strategy. |
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