| 引用本文: | 郭文有,潘春荣.腔室清洗的单臂组合设备初始暂态调度[J].控制理论与应用,2024,41(2):303~310.[点击复制] |
| GUO Wen-you,PAN Chun-rong.Scheduling of start-up process for single-arm cluster tools with chamber cleaning operations[J].Control Theory and Technology,2024,41(2):303~310.[点击复制] |
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| 腔室清洗的单臂组合设备初始暂态调度 |
| Scheduling of start-up process for single-arm cluster tools with chamber cleaning operations |
| 摘要点击 3920 全文点击 344 投稿时间：2021-12-08 修订日期：2023-11-24 |
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| DOI编号 10.7641/CTA.2023.11198 |
| 2024,41(2):303-310 |
| 中文关键词 组合设备 腔室清洗 初始暂态 晶圆制造 |
| 英文关键词 cluster tool chamber cleaning operation start-up process wafer fabrication |
| 基金项目 国家自然科学基金项目(72161019), 江西省高等学校井冈学者特聘教授岗位 |
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| 中文摘要 |
| 为了提升腔室洁净度, 晶圆厂需对组合设备腔室进行清洗操作, 从而提高晶圆的加工质量. 考虑腔室清洗时间和晶圆驻留时间的约束条件下, 本文研究了单臂组合设备的初始暂态调度问题. 首先, 提出了机械手的初始暂态活动规则, 并对机械手活动序列进行描述, 实现了系统的初始暂态可调度性; 其次, 对机械手在初始暂态和稳态的活动时间进行了建模; 然后, 根据系统的时间特性, 建立了初始暂态调度的线性规划模型; 最后, 通过实例验证了该方法的有效性. 与已有的虚拟晶圆方法相比, 该调度方法能有效减少初始暂态的完工时间, 提高了组合设备的晶圆生产效率. |
| 英文摘要 |
| In order to improve the cleanliness of chambers, fabs generally perform chamber cleaning operations on cluster tools, thereby improving wafer quality. The start-up process scheduling problem is addressed considering the time constraints of wafer residency and chamber cleaning. Firstly, start-up process activity rule of robot is proposed and the sequence of robot activities is described to achieve the start-up process schedulability. Secondly, the activity time of robot in the start-up process and steady state is modeled. Then, a linear programming model for start-up process scheduling is developed based on the time characteristics. Finally, examples are given to verify the validity of the proposed approach. Compared with the virtual wafer method proposed by the predecessors, the scheduling scheme can effectively reduce makespan and improve the wafer productivity of single-arm cluster tools. |
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