一种检测单晶炉热场温度的新方法

A new method for measuring heat zone temperature of single crystal furnace

中文关键词  单晶炉  热场温度检测  低频干扰  跨维模拟退火  最大似然准则  AIC准则  最小二乘法

英文关键词  single crystal furnace  heat zone temperature measurement  low frequency interference  trans-dimensional simulated annealing  maximum likelihood criterion  Akaike information criterion  least square

中文摘要

      为去除单晶炉热场温度测量信号中的低频干扰、提高温度信号的估计精度, 本文提出了一种基于跨维模拟退火(trans dimensional simulated annealing, TDSA)的单晶炉热场温度检测方法. 该方法首先将AIC(Akaike information criterion)信号个数判断准则纳入采样机制中以便对干扰个数采样估计, 进而利用所设计的基于信号频谱和轮盘赌思想的Metropolis Hastings机制对相应个数的干扰频率进行采样, 最后设计了混合均匀和高斯采样机制对单晶炉热场温度进行采样估计. 仿真和单晶炉工程实验结果表明, 该方法在干扰个数未知的情况下, 能够有效地抑制低频干扰、准确检测单晶炉热场的温度.

英文摘要

      We propose a trans-dimensional simulated annealing (TDSA)-based method for the temperature measurement of the single crystal furnace heat zone to remove the low frequency interference and improve the estimation accuracy of the temperature. This method firstly introduces Akaike information criterion (AIC) into the sampling mechanism to estimate the number of interferences, and then utilizes the designed Metropolis Hastings sampling mechanism that combines the signal frequency spectrum and roulette-based ideas to sample the estimated number of interference frequencies. Finally a mixed uniform and Gaussian distribution sampling mechanism is designed to sample and estimate the temperature of the single crystal furnace heat zone. Simulation and practical engineering experiment results show that the proposed method can effectively restrain the low frequency interference and accurately detect the temperature of the single crystal furnace heat zone with uncertain number of interferences.