超精密伺服系统控制与应用

Control and applications of ultra high precision mechatronics

中文关键词  超精密伺服系统  微纳操控  鲁棒控制  抗干扰控制  内模控制

英文关键词  ultra high precision mechatronics  nano manipulation  robust control  anti-disturbance control  internalmodel based control

中文摘要

      随着智能微纳器件和高性能数字系统的飞速发展, 超精密伺服技术已逐步成为信息存储、精密成像、半导体装备等新兴行业的核心技术. 本文从微纳操控领域的设计和控制问题着手, 首先介绍了超精密伺服系统的设计及分析方法, 进而阐述了超精密伺服系统对控制理论提出的诸多挑战. 特别针对这类系统中广泛存在的模型不确定性及高阶未建模动态特性, 非线性迟滞特性及执行机构饱和非线性, 多源复杂干扰并存情况的抗干扰控制问题, 以及面向复杂轨迹的高精度跟踪控制问题, 给出了具有代表性的控制算法和应用实例. 本文最后以高精度直写式真空蒸发系统为例, 介绍了超精密伺服技术在现代精密仪器设备中的重要应用.

英文摘要

      With the rapid development of micro/nano manipulations and high-performance digital systems, the control technique of ultra high precision mechatronics becomes one of the core technologies in many emerging industrial applications such as data storage systems, high resolution imaging systems, semiconductor equipment, etc. From the perspective of micro/nano manipulations, this paper first describes the design and analysis methods for ultra high precision mechatronics; and then, discusses major challenges in controlling these systems, which includes the robust control for higher order unmodeled dynamics and hysteresis nonlinearity, anti-windup compensation for the actuator saturations, composite hierarchical anti-disturbance control for multiple disturbance cancelations/rejections, as well as the internal-model-based high precision tracking control. Finally, a novel direct writing vacuum evaporation system is introduced, which represents the important application of nano manipulations to precision instruments and equipment.